The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 05, 2025

Filed:

Nov. 29, 2022
Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventor:

Kazuyuki Nagata, Minowa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01P 15/08 (2006.01); G01P 15/18 (2013.01);
U.S. Cl.
CPC ...
G01P 15/08 (2013.01); G01P 15/0802 (2013.01); G01P 15/18 (2013.01); G01P 2015/0871 (2013.01);
Abstract

A physical quantity sensor detects a physical quantity in at least one of a first direction and a second direction. The physical quantity sensor includes a fixed electrode unit provided on a substrate, a movable body including a movable electrode unit provided such that movable electrodes face fixed electrodes of the fixed electrode unit, a fixed portion fixed to the substrate, a support beam having one end coupled to the fixed portion and the other end coupled to the movable body, and a restricting unit configured to restrict displacement of the movable body. The restricting unit includes a first portion having one end coupled to the movable body and extending in the first direction, and a second portion having one end coupled to the other end of the first portion and extending in the second direction.


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