The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Mar. 07, 2023
Samsung Electronics Co., Ltd., Suwon-si, KR;
Wookjin Lee, Suwon-si, KR;
Ghilgeun Oh, Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
An optical failure detection system includes a test chamber having an accommodating space therein, the test chamber including an upper cover having an opening therein; a substrate plate provided in the opening of the upper cover, the substrate plate including: a first surface on which a wafer is disposed; a second surface opposite to the first surface; and an optical window formed in a central region of the substrate plate and through which the wafer is exposed; a temperature control device including a plurality of thermoelectric devices provided around the optical window of the substrate plate, the temperature control device being configured to heat or cool at least one semiconductor device of the wafer; and an optical device provided in the accommodating space of the test chamber, the optical device being configured to radiate light toward the at least one semiconductor device through the optical window.