The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Sep. 09, 2022
Applicant:
Pva Tepla Ag, Wettenberg, DE;
Inventors:
Assignee:
PVA TEPLA AG, Wettenberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/95 (2006.01); G01N 35/10 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G01N 21/9501 (2013.01); G01N 35/1011 (2013.01); H01L 21/67288 (2013.01); G01N 2021/9511 (2013.01);
Abstract
The invention relates to a method and system for performing VPD-DC on wafer surfaces, wherein the pipette substitutes for the function of the scan tube and is operated such that a bulge of scanning liquid protrudes from the pipette channel and contacts the wafer surface for scanning.