The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Aug. 31, 2022
Applicant:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Inventors:
Assignee:
Kabushiki Kaisha Toshiba, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/88 (2006.01); G01N 21/01 (2006.01); G01N 21/41 (2006.01);
U.S. Cl.
CPC ...
G01N 21/8851 (2013.01); G01N 21/01 (2013.01); G01N 21/41 (2013.01); G01N 21/8806 (2013.01); G01N 2021/8845 (2013.01);
Abstract
According to an embodiment, an optical inspection method includes calculating irradiation field information concerning an irradiation field on a surface of a subject when irradiating the surface of the subject with a light beam from an illumination device that is supported by a movable body and moved; and performing path calculation processing of calculating, based on the irradiation field information, a path for the illumination device to move.