The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 05, 2025
Filed:
Oct. 12, 2023
Applicant:
Wonik Ips Co., Ltd., Pyeongtaek-si, KR;
Inventor:
Kyu Tae Cho, Pyeongtaek-si, KR;
Assignee:
WONIK IPS CO., LTD., Pyeongtaek-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B23K 1/00 (2006.01); B23K 1/20 (2006.01); B23K 35/30 (2006.01); B23K 101/36 (2006.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
B23K 1/0016 (2013.01); B23K 1/20 (2013.01); B23K 35/3013 (2013.01); B23K 2101/36 (2018.08); H02N 13/00 (2013.01);
Abstract
Disclosed herein is a method of assembling a substrate supporting apparatus, including coupling a conductive rod to an electrode installed in a substrate support provided to support a substrate, forming a sacrificial layer on the rod, bonding the rod and the electrode by melting and infiltrating a filler into a coupling area between the rod and the electrode, while forming a protective layer between the rod and the sacrificial layer by infiltrating the filler into a gap between the rod and the sacrificial layer, and coupling a shaft to the substrate support, the rod extending through the shaft.