The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
May. 25, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Soeun Shin, Seongnam-si, KR;
Jin Choi, Seoul, KR;
Assignee:
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/24 (2012.01); H01L 21/311 (2006.01); H10B 12/00 (2023.01); H10N 50/01 (2023.01);
U.S. Cl.
CPC ...
G03F 1/24 (2013.01); H01L 21/31144 (2013.01); H10B 12/033 (2023.02); H10N 50/01 (2023.02);
Abstract
A reticle includes a mask substrate, a reflective layer on the mask substrate, and a mask pattern on the reflective layer, the mask pattern having image patterns to absorb light, and first patterns between the image patterns, the first patterns being openings, the first patterns having a honeycomb arrangement, in a plan view, such that seven of the first patterns are arranged at corresponding vertices and a center of a first regular hexagon, and each of the first patterns having a shape of a second regular hexagon that is rotated by 90 degrees relative to the first regular hexagon.