The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2025

Filed:

May. 13, 2022
Applicant:

Jsw Aktina System Co., Ltd., Yokohama, JP;

Inventors:

Kenichi Ohmori, Yokohama, JP;

Yuzaburo Ohta, Yokohama, JP;

Rei Matsushita, Yokohama, JP;

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G02F 1/01 (2006.01); G01J 1/42 (2006.01); H01L 21/02 (2006.01); H01S 3/00 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
G02F 1/0121 (2013.01); G01J 1/4257 (2013.01); H01S 3/0085 (2013.01); G02F 2203/48 (2013.01); H01L 21/02678 (2013.01); H01L 21/02686 (2013.01); H01L 21/02691 (2013.01); H01S 3/225 (2013.01);
Abstract

A laser irradiation apparatus including a laser light source includes a first detection unit and a second detection unit configured to detect luminance of a substrate irradiated with laser light from the laser light source, and a control unit configured to perform control related to laser light emitted from the laser light source, in which the control unit specifies an energy density of laser light based on luminance detected by the first detection unit, specifies reference luminance based on a specified energy density and luminance detected by the second detection unit, and changes an energy density of laser light according to the reference luminance and luminance detected by the second detection unit.


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