The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Jul. 10, 2020
Wiinaa Co., Ltd., Anhui, CN;
Wiinaa Co., Ltd., Anhui, CN;
Abstract
A MEMS gas sensor (A), array thereof, and preparation method therefor. The MEMS gas sensor comprises a first substrate (A) provided with a first cavity (A), and N gas detection assemblies (A) provided at an opening of A, each Acomprises: a supporting arm (A) and a gas detection part (A) provided on the A; the Acomprises a strip-shaped heating electrode part (A), an insulating layer (A), a strip-shaped detection electrode part (A), and a gas-sensitive material part (A) that are stacked sequentially; the Acomprises a first detection electrode part (A-) and a second detection electrode part (A-) with a first opening (A) therebetween; the Ais provided at the A; a first end of the Ais connected to the A-, a second end of the Ais connected to the A-; strip-shaped heating electrode parts in each Aare connected sequentially to form a heater (A).