The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 29, 2025

Filed:

Aug. 23, 2022
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Anssi Blomqvist, Helsinki, FI;

Ville-Pekka Rytkönen, Klaukkala, FI;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/5712 (2012.01); G01C 19/00 (2013.01); G01C 19/5733 (2012.01); G01C 19/5747 (2012.01); G01C 19/5783 (2012.01);
U.S. Cl.
CPC ...
G01C 19/5712 (2013.01); G01C 19/005 (2022.01); G01C 19/5733 (2013.01); G01C 19/5747 (2013.01); G01C 19/5783 (2013.01);
Abstract

The invention relates to the field of microelectromechanical systems (MEMS) gyroscopes. The MEMS gyroscope of the present invention drives oscillation of at least one proof mass in a primary drive mode at a first frequency and in a secondary drive mode at a second frequency, different to the first frequency. The primary drive mode and secondary drive mode are orthogonal. Sense circuitry measures oscillation of the at least one proof mass in a sense mode, which is orthogonal to the primary drive mode and the secondary drive mode, in order to determine the angular rate of rotation of the MEMS gyroscope about sense axes parallel to the movement of the at least one proof mass in the primary and secondary drive modes.


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