The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Feb. 16, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Min Soo Park, Yongin-si, KR;
Ji Hun Kim, Uiwang-si, KR;
Gyeong Dam Baek, Hwaseong-si, KR;
Min-Gu Chang, Seoul, KR;
Tae Hyun Jo, Cheonan-si, KR;
Ji Yoon Jung, Ansan-si, KR;
Su Hyun Kim, Seoul, KR;
Hyun Gyu Roh, Seoul, KR;
Se Woong Ahn, Cheonan-si, KR;
Goen Hui Kim, Daejeon, KR;
Hyo Joo Jeoun, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., , KR;
SEMES CO., LTD., , KR;
Abstract
A cleaning device for a substrate transfer device comprises a traveling unit configured to travel along a rail having first and second areas, a rail unit including the rail and a rail structure disposed on the rail, and a rinsing unit including a suction part disposed on the rail and that rotates about a suction nozzle. When the rinsing unit is placed in contact with the rail structure, the suction part rotates about the suction nozzle.