The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 29, 2025
Filed:
Oct. 03, 2022
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Paul Benjamin Reuter, Austin, TX (US);
Steven Trey Tindel, Austin, TX (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D 1/26 (2006.01); B05C 5/02 (2006.01); B05C 15/00 (2006.01);
U.S. Cl.
CPC ...
B05D 1/26 (2013.01); B05C 5/027 (2013.01); B05C 15/00 (2013.01);
Abstract
An equipment front end module (EFEM) having walls, a first wall including one or more load ports and an EFEM chamber formed between the walls. The EFEM further includes an upper plenum at a top of the EFEM and including an opening into the EFEM chamber. Ducts provide a return gas flow path enabling recirculation of gas from the EFEM chamber to the upper plenum, the ducts proximate the one or more load ports. The one or more ducts includes flow elements configured to cause a low pressure condition at a location of the one or more load ports.