The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Oct. 21, 2021
Taiwan Carbon Nano Technology Corporation, Miaoli County, TW;
Tsung Fu Yen, Miaoli County, TW;
Kuang-Jui Chang, Miaoli County, TW;
Chiun-Shian Tsai, Miaoli County, TW;
Ting-Chuan Lee, Miaoli County, TW;
Chiun-Rung Tsai, Miaoli County, TW;
Taiwan Carbon Nano Technology Corporation, Miaoli County, TW;
Abstract
A method for manufacturing a film bulk acoustic resonance device is disclosed. The proposed method, wherein the device has a specific resonant frequency, includes: providing a substrate having a recess, wherein the recess has a height; configuring a first piezoelectric material layer on the substrate, and causing the recess to form an air gap; configuring a lower electrode on the first piezoelectric material layer; when the height is in a first range, causing a resonant frequency of the film bulk acoustic resonance device versus the height to have a first slope; when the height is in a second range, causing the resonant frequency versus the height to have a second slope; and causing the first slope to be smaller than the second slope.