The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Jun. 05, 2023
SK Hynix Inc., Icheon, KR;
Industry-university Cooperation Foundation Hanyang University, Seoul, KR;
SK hynix Inc, Icheon, KR;
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY, Seoul, KR;
Abstract
An inductively coupled plasma type ion implanter may include a reaction tube, an induction coil surrounding the reaction tube, an aperture structure arranged over the reaction tube, a showerhead arranged on a lower surface of the reaction tube, a flange arranged under the showerhead, first and second aperture adaptors connected between the flange and the aperture structure, a gas line receiving the reaction gas from the flange and transferring the reaction gas to the showerhead and a cooling line receiving a cooling fluid from the flange. A circulation length of the cooling line around the flange is longer than a circulation length of the gas line around the flange.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile