The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Oct. 21, 2022
Semes Co., Ltd., Chungcheongnam-do, KR;
Dong Hyun Jun, Gyeonggi-do, KR;
SEMES CO., LTD., Chungcheongnam-do, KR;
Abstract
The present invention provides an apparatus and method for diagnosing semiconductor equipment for analyzing a determination result and a cause of a defect for a substrate using a deep learning algorithm and explainable AI. The semiconductor equipment diagnosis method comprises acquiring time series data for a parameter related to a substrate treating process of a substrate treating apparatus, generating table information based on the time series data, converting the table information into image information based on data included in the table information, extracting and classifying a feature from the image information, determining whether a substrate treated by the substrate treating apparatus is good or defective based on the feature, and analyzing a cause of a defect of the substrate in response to determining that the substrate is defective.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile