The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Nov. 27, 2023
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventor:
Wolfgang R. Aderhold, Cupertino, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01J 5/00 (2022.01); G01J 5/0808 (2022.01); G02B 1/11 (2015.01); G02B 5/09 (2006.01); H01L 21/67 (2006.01); H05B 1/02 (2006.01); H05B 3/00 (2006.01);
U.S. Cl.
CPC ...
G01J 5/0007 (2013.01); G01J 5/0808 (2022.01); G02B 1/11 (2013.01); G02B 5/09 (2013.01); H01L 21/67115 (2013.01); H01L 21/67248 (2013.01); H05B 1/0233 (2013.01); H05B 3/0047 (2013.01); H05B 2203/032 (2013.01);
Abstract
Embodiments of the present disclosure generally relate to apparatus for processing a substrate, and more specifically to reflector plates for rapid thermal processing. In an embodiment, a reflector plate assembly for processing a substrate is provided. The reflector plate assembly includes a reflector plate body, a plurality of sub-reflector plates disposed within the reflector plate body, and a plurality of pyrometers. A pyrometer of the plurality of pyrometers is coupled to an opening formed in a sub-reflector plate. Chambers including a reflector plate assembly are also described herein.