The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 22, 2025
Filed:
Jul. 05, 2022
Asm Ip Holding B.v, Almere, NL;
Theodorus G. M. Oosterlaken, Oudewater, NL;
Adriaan Garssen, Doom, NL;
Herbert Terhorst, Amersfoort, NL;
Lucian Jdira, Nieuw Vennep, NL;
ASM IP Holding B.V., Almere, NL;
Abstract
An apparatusfor processing a plurality of substratesis provided. The apparatus may have a process tubecreating a process chamber; a heatersurrounding the process tube; a flangefor supporting the process tube; and a doorconfigured to support a wafer boatwith a plurality of substratesin the process chamber and to seal the process chamber. An exhaust operably connected to the process chambermay be provided to remove gas from the process chamber via a first exhaust duct. The apparatus may be provided with an extractor chambersurrounding the first exhaust duct where it connects to the process chamber and connected to a second exhaust ductto remove gas from the extractor chamber.