The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Jun. 21, 2019
Indian Institute of Technology Bombay, Mumbai, IN;
Udayan Ganguly, Mumbai, IN;
Apurba Laha, Mumbai, IN;
Suddhasatta Mahapatra, Mumbai, IN;
Amita, Mumbai, IN;
Krista Roluahpuia Khiangte, Mumbai, IN;
INDIAN INSTITUTE OF TECHNOLOGY BOMBAY, Maharashtra, IN;
Abstract
Embodiments herein disclose a method providing deposition of Gadolinium Oxide (GdO) on a semiconductor substrate. The method comprises of selecting, in an RF-sputter system, a predefined substrate and depositing, in an Ar-plasma struck, the GdO, over the predefined substrate to obtain a layer of the GdOover the predefined substrate. The GdOis grown epitaxially over the predefined substrate. The method further provides performing, annealing, of the layer of the GdOover the predefined substrate at a predefined temperature for a predefined time and obtaining, a layer of the GdO, over the predefined substrate. Embodiment also provides a method for fabricating Semiconductor on Insulator Substrate (SIS).