The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Feb. 01, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Hiroaki Fujiwara, Tochigi, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An information processing apparatus includes an acquisition unit configured to acquire information including a processing result of processing a substrate by a substrate processing apparatus configured to perform substrate processing at a first timing, event information about an event having occurred in the substrate processing apparatus at a second timing after the first timing, and a processing result of processing the substrate by the substrate processing apparatus at a third timing after the second timing, and a display control unit configured to perform control so that a display device displays a chronological graph of a processing result including the processing result at the first timing and the processing result at the third timing based on the information acquired by the acquisition unit, wherein the display control unit performs control to display information in a superimposed manner on the graph, the information indicating the second timing.