The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Apr. 29, 2024
Sinfonia Technology Co., Ltd., Tokyo, JP;
Toshihiro Kawai, Tokyo, JP;
Gengoro Ogura, Tokyo, JP;
Sinfonia Technology Co., Ltd., Tokyo, JP;
Abstract
Particles in an accommodation chamber are also easily discharged while facilitating replacement of an atmosphere in the accommodation chamber with an inert gas. An EFEM includes a load port, a housing configured to define, in the housing, a transfer chamber closed by connecting the load portto an opening provided in a partition wall, a supply pipe for supplying nitrogen to a transfer chamber, and a discharge pipefor discharging a gas in the transfer chamber. The load portincludes an opening/closing mechanismcapable of opening and closing a lidof a mounted FOUP, and an accommodation chamberkept in communication with the transfer chamber via a slitand configured to accommodate a part of the opening/closing mechanism. The discharge pipeis connected to the accommodation chamberto discharge the gas in the transfer chamber via the accommodation chamber