The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Jul. 24, 2020
Lam Research Corporation, Fremont, CA (US);
Prasanna Kulkarni, Tigard, OR (US);
Rachel E. Batzer, Tigard, OR (US);
Ted Tan, West Linn, OR (US);
Vivekanandan Krishnaswamy, Bangalore, IN;
Boonyarit Woonprasert, Tigard, OR (US);
Shawn Fiedler, Tigard, OR (US);
LAM RESEARCH CORPORATION, Fremont, CA (US);
Abstract
A method comprises arranging an apparatus on a top surface of a pedestal in a processing chamber. The apparatus comprises an annular member, N supporting members, and N pins, where N is an integer greater than two. The N supporting members support the annular member in a plane parallel to and above the top surface of the pedestal. The N pins are arranged perpendicularly to the plane along a circumference around the annular member. Each of the N pins includes threads engageable with respective threaded slots in the apparatus. Each of the N pins includes a conical end pointing towards the top surface of the pedestal and engageable with a periphery of the top surface of the pedestal. The method further comprises aligning a center of the annular member to a center of the pedestal by adjusting one or more of the N pins.