The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
May. 27, 2022
Canon Kabushiki Kaisha, Tokyo, JP;
Yuichi Fujita, Tochigi, JP;
Shinichiro Hirai, Saitama, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
A inspection apparatus for detecting a foreign matter on a substrate on which a pattern is formed includes a detection unit including a light projector for projecting light on a surface of the substrate and a light receiver, a change mechanism for changing an area of the light projected by the light projector to a first area and a second area that is smaller than the first area without changing a light amount, and a control unit for detecting the foreign matter based on a first light amount received by the light receiver in a case where the light is projected in the first area on the surface of the substrate and a second light amount received by the light receiver in a case where the light is projected in the second area on the surface of the substrate.