The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 15, 2025

Filed:

Sep. 06, 2022
Applicant:

Raontec Inc., Suwon-si, KR;

Inventors:

Jin Ho Oh, Seoul, KR;

Sang Chan Choi, Gunpo-si, KR;

Zheng Yuan Li, Suwon-si, KR;

Assignee:

RAONTEC INC., Suwon-si, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/687 (2006.01); B65G 47/90 (2006.01);
U.S. Cl.
CPC ...
B65G 47/90 (2013.01); H01L 21/68707 (2013.01);
Abstract

A wafer transfer robot apparatus based on a direct drive motor, includes: a hand module including a hand loading a wafer from one surface and a hand arm coupled to the hand to transfer the wafer; an R-axis module; a connecting enclosing module having one end coupled to the R-axis module; and a T-axis module rotatably coupled to the connecting enclosure module.


Find Patent Forward Citations

Oh, Jin. (2025). Wafer transfer robot apparatus based on direct drive motor (U.S. Patent No. 12358734). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12358734

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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