The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Feb. 07, 2023
Vat Holding Ag, Haag, CH;
Clemens Kühne, Valens, CH;
VAT Holding AG, Haag, CH;
Abstract
A lifting device for lowering a substrate onto and for lifting it off from a substrate carrier in a process chamber. The lifting device had a lifting rod and a linear drive, for moving the lifting rod along a linear lifting movement path, and a plurality of adjustment screws for adjusting the position of the lifting movement path. The lifting device has a drive housing for the linear drive, and a drive housing flange and a passage opening surrounded by this flange. The lifting rod is guided through the passage opening, and the adjustment screws are each screwed through an adjustment screw receiving opening in the drive housing flange. The adjustment screw receiving openings are spaced apart in the drive housing flange, and a protrusion of the respective adjustment screw over the drive housing flange is adjustable by screwing that adjustment screw through the respective receiving opening at differing depths.