The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

Feb. 26, 2024
Applicant:

Tdk Corporation, Tokyo, JP;

Inventor:

Junpei Morishita, Tokyo, JP;

Assignee:

TDK Corporation, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/00 (2023.01); H10N 30/076 (2023.01); H10N 30/853 (2023.01); H10N 30/87 (2023.01);
U.S. Cl.
CPC ...
H10N 30/708 (2024.05); H10N 30/076 (2023.02); H10N 30/8536 (2023.02); H10N 30/878 (2023.02);
Abstract

Provided is a piezoelectric thin film containing a tetragonal crystalof a perovskite type oxide and a tetragonal crystalof the oxide. A (001) plane of the tetragonal crystaland a (001) plane of the tetragonal crystalare oriented in a normal direction of a surface of the piezoelectric thin film. An interval of the (001) plane of the crystalis c1. An interval of a (100) plane of the crystalis al. An interval of the (001) plane of the crystalis c2. An interval of a (100) plane of the crystalis a2. c2/a2 is more than c1/a1. A peak intensity of diffracted X-rays of the (001) plane of the crystalis I. A peak intensity of diffracted X-rays of the (001) plane of the crystalis I. I(I+I) is from 0.50 to 0.90.


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