The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

May. 17, 2022
Applicant:

Texas Instruments Incorporated, Dallas, TX (US);

Inventors:

Honglin Guo, Dallas, TX (US);

Robert M. Higgins, Plano, TX (US);

Assignee:
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/66 (2006.01);
U.S. Cl.
CPC ...
H01L 22/34 (2013.01);
Abstract

A method of forming an integrated circuit on a substrate is described herein. The method includes forming a first doped region of a detection structure on the substrate, the first doped region comprises a first doped conductivity type. The method forming a capacitor of the detection structure, which includes forming a second doped region of a second conductivity type opposite the first doped conductivity type, the second doped region surrounded by the first doped region. The second doped well comprises a top surface area smaller than a top surface area of the first doped region. The method includes performing parametric testing on the capacitor over a plurality of breakdown voltages. The method includes determining the gate oxide integrity of the capacitor based on the parametric testing over the plurality of breakdown voltages.


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