The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
Jan. 27, 2023
Eugene Technology Co., Ltd., Yongin-si, KR;
Woo Duck Jung, Yongin-si, KR;
Jeong Hee Jo, Yongin-si, KR;
Ryong Hwang, Yongin-si, KR;
Se Jong Sung, Yongin-si, KR;
Woong Joo Jang, Yongin-si, KR;
Sang Soon Jung, Yongin-si, KR;
EUGENE TECHNOLOGY CO., LTD., Yongin-si, KR;
Abstract
According to an embodiment of the present invention, an apparatus for processing substrate comprising: a susceptor; and a cover unit installed on an upper part of the susceptor, the substrate is placed on the cover unit, wherein the cover unit comprises: a cover frame having one or more air gaps; and one or more covers having a shape corresponding to each of the air gaps and mountable in each of the air gaps, wherein a depth of the air gap is at least three times the thickness of the substrate.