The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

Mar. 04, 2022
Applicant:

Soleras Advanced Coatings Bv, Deinze, BE;

Inventors:

Wilmert De Bosscher, Drongen, BE;

Ivan Van De Putte, Waregem, BE;

Ignacio Caretti Giangaspro, Antwerp, BE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/54 (2006.01); C23C 14/00 (2006.01); C23C 14/08 (2006.01); C23C 14/16 (2006.01); C23C 14/34 (2006.01); H01J 37/34 (2006.01);
U.S. Cl.
CPC ...
C23C 14/547 (2013.01); C23C 14/0042 (2013.01); C23C 14/083 (2013.01); C23C 14/165 (2013.01); C23C 14/3407 (2013.01); H01J 37/3426 (2013.01); H01J 37/3476 (2013.01); H01J 2237/24585 (2013.01); H01J 2237/332 (2013.01);
Abstract

A method of depositing a layer on a piece by sputter deposition, a coater and a processor for controlling a coater in accordance with the method are provided. The method includes providing deposition of metallic and reactive species simultaneously on a piece for forming a layer under predetermined sputtering conditions, thereby providing a deposited layer on the piece comprising a metal compound. The deposited layer is subsequently irradiated and the optical transmittance is measured. A measured parameter related to the measured radiation is compared with one stored value of that parameter. The sputtering conditions are thereby adapted as a result of the comparison.


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