The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
Dec. 15, 2021
Seiko Epson Corporation, Tokyo, JP;
Chikara Kojima, Matsumoto, JP;
SEIKO EPSON CORPORATION, Tokyo, JP;
Abstract
An ultrasonic element includes a substrate in which an opening is formed, a vibrating plate provided at the substrate, the vibrating plate including a first surface in contact with the substrate, the vibrating plate blocking the opening, a piezoelectric element provided at a second surface on an opposite side from the first surface of the vibrating plate, a protective substrate facing the second surface and protecting the piezoelectric element, and a suppressing unit provided between the protective substrate and the vibrating plate, the suppressing unit being configured to suppress a vibration of the vibrating plate, in which in the piezoelectric element, a first electrode, a piezoelectric layer, and a second electrode are stacked in this order from the second surface, and an active part is a part of the vibrating plate where the first electrode, the piezoelectric layer, and the second electrode overlap, the suppressing unit is provided around the active part, and a slit is formed in the suppressing unit, in plan view from a stacking direction.