The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Jan. 04, 2024
Applicant:

Semiconductor Energy Laboratory Co., Ltd., Atsugi, JP;

Inventors:

Shunpei Yamazaki, Setagaya, JP;

Katsuaki Tochibayashi, Isehara, JP;

Ryota Hodo, Atsugi, JP;

Kentaro Sugaya, Atsugi, JP;

Naoto Yamade, Isehara, JP;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/24 (2006.01); H10B 12/00 (2023.01); H10D 30/01 (2025.01); H10D 30/67 (2025.01); H10D 62/80 (2025.01);
U.S. Cl.
CPC ...
H10D 30/6755 (2025.01); H10B 12/05 (2023.02); H10B 12/31 (2023.02); H10D 30/031 (2025.01); H10D 62/80 (2025.01);
Abstract

A semiconductor device includes a transistor including, a first to fifth insulator, a first to third oxide, a first to third conductor. An opening reaching the second oxide is provided in the fourth insulator and the fifth insulator. The third oxide, the third insulator, and the third conductor are arranged sequentially from the inner wall side of the opening so as to fill the opening. In the channel length direction of the transistor, at least part of the fourth insulator in a region where the fourth insulator and the second oxide do not overlap with each other is in contact with the first insulator. In the channel width direction of the transistor, at least part of the third oxide in a region where the third oxide and the second oxide do not overlap with each other is in contact with the first insulator.


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