Preparation method of high-linearity gan-based millimeter wave device

Abstract

The present invention discloses a high-linearity GaN-based millimeter wave device and preparation method thereof. The device includes an AlGaN/GaN heterojunction epitaxial layer, the AlGaN/GaN heterojunction epitaxial layer is of a boss structure, a protruding portion above the boss is an active region, two ends of an upper surface of the active region are respectively connected to a source electrode and a drain electrode, p-type GaN regions with different doping concentrations are located between the source electrode and the drain electrode on the upper surface of the active region, wherein the p-type GaN regions with different doping concentrations are formed by arranging a first p-type GaN region and a second p-type GaN region with different doping concentrations and the same thickness front and back along a gate width, a rear surface of the first p-type GaN region coincides with a front surface of the second p-type GaN region, and left and right edges of the first p-type GaN region and the second p-type GaN region are aligned respectively; and a gate electrode is located above the p-type GaN regions with different doping concentrations. The proposed structure of placing p-type GaN regions with different doping concentrations under the gate effectively modulates the threshold voltage of the device and improves the linearity of the device.