The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Apr. 09, 2021
Applicant:
Ngk Insulators, Ltd., Nagoya, JP;
Inventors:
Masaki Ishikawa, Handa, JP;
Shuichiro Motoyama, Nagoya, JP;
Assignee:
NGK INSULATORS, LTD., Nagoya, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/14 (2006.01); H05B 3/10 (2006.01);
U.S. Cl.
CPC ...
H05B 3/143 (2013.01); H05B 3/10 (2013.01); H05B 3/141 (2013.01); H05B 2203/017 (2013.01);
Abstract
A ceramic heater includes a ceramic plate. The ceramic plate has a wafer placement surface, and is divided into an inner-peripheral zone having a circular shape and an outer-peripheral zone having an annular shape. An inner-peripheral resistance heating element that is composed of high-melting-point metal is disposed in the inner-peripheral zone. An outer-peripheral resistance heating element that has at least a surface composed of metal carbide is disposed in the outer-peripheral zone.