The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Mar. 22, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
A semiconductor device includes a structure including a stack structure including a first stack structure and a second stack structure on the first stack structure; a memory vertical structure penetrating the structure; a support vertical structure including a portion penetrating the structure and including an air gap; and a peripheral contact plug, wherein the first and second stack structures includes interlayer insulating layers and gate layers alternately stacked, a side of the memory vertical structure includes a slope changing portion, the peripheral contact plug includes an upper region disposed on a level higher than an upper surface of an uppermost gate layer, the upper region of the peripheral contact plug includes a first region, a second region and a connection region between the first and second regions, and the connection region has a slope different from a slope of at least one of the first and second regions.