The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Oct. 29, 2020
Applicant:

Sony Semiconductor Solutions Corporation, Kanagawa, JP;

Inventors:

Katsuhiko Takeuchi, Kanagawa, JP;

Keita Takahashi, Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/768 (2006.01); H01L 21/67 (2006.01); H10D 30/01 (2025.01); H10D 64/27 (2025.01); H10D 84/83 (2025.01);
U.S. Cl.
CPC ...
H01L 21/768 (2013.01); H01L 21/67063 (2013.01); H10D 64/511 (2025.01); H10D 84/83 (2025.01); H10D 30/015 (2025.01);
Abstract

The on-resistance of each of field effect transistors having different planar sizes is reduced. A semiconductor device includes first and second field effect transistors mounted on a semiconductor substrate and an insulating layer provided on a main surface of the semiconductor substrate. Here, each of the first and second field effect transistors includes a pair of main electrodes which are separated from each other and provided on the main surface of the semiconductor substrate, a cavity part which is provided in the insulating layer between the pair of main electrodes, and a gate electrode which has a head part positioned on the insulating layer and a body part that penetrates the insulating layer from the head part and protrudes toward the cavity part and in which the head part is wider than the body part. Here, the width of the cavity part of the second field effect transistor is different from the width of the cavity part of the first field effect transistor.


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