The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Oct. 24, 2022
Semes Co., Ltd., Cheonan-si, KR;
Jin Woo Jung, Cheonan-si, KR;
Jin Mo Jae, Cheonan-si, KR;
Sang Min Lee, Seoul, KR;
Young Hun Lee, Cheonan-si, KR;
Yong Hyun Choi, Cheonan-si, KR;
Yong Joon Im, Yongin-si, KR;
Seung Hoon Oh, Cheonan-si, KR;
Semes Co., Ltd., Chungcheongnam-do, KR;
Abstract
The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a housing for providing a treating space for treating a substrate within; a support unit for supporting the substrate in the treating space; a bottom supply port for supplying a process fluid to the treating space; and a filler member positioned below the substrate supported on the support unit in the treating space, and wherein the filler member forms a buffer space facing the bottom supply port, and a passage is formed between the filler member and an inner wall of the housing and flows the process fluid which is introduced to the buffer space in a direction of the substrate.