The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Sep. 20, 2022
Applicant:
Samsung Electronics Co., Ltd., Suwon-si, KR;
Inventors:
Mun Ja Kim, Hwaseong-si, KR;
Ji Beom Yoo, Seoul, KR;
Ki Bong Nam, Suwon-si, KR;
Jin Ho Yeo, Suwon-si, KR;
Changyoung Jeong, Yongin-si, KR;
Qicheng Hu, Suwon-si, KR;
Assignees:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/62 (2012.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 1/62 (2013.01); G03F 7/70983 (2013.01);
Abstract
A method of fabricating a pellicle structure includes forming a metal layer on a temporary substrate, forming a membrane on the metal layer, exposing a bottom surface of the metal layer by separating the temporary substrate from the metal layer, and exposing a bottom surface of the membrane by etching the exposed bottom surface of the metal layer.