The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Oct. 21, 2022
Applicant:

Fujifilm Corporation, Tokyo, JP;

Inventor:

Keisuke Aoshima, Kanagawa, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 26/08 (2006.01); B81B 3/00 (2006.01); G02B 5/08 (2006.01);
U.S. Cl.
CPC ...
G02B 26/0858 (2013.01); B81B 3/0018 (2013.01); G02B 5/0808 (2013.01); B81B 2201/042 (2013.01);
Abstract

The micromirror device includes a mirror part, a first actuator that reciprocally rotates the mirror part about the first axis, and a second actuator that reciprocally rotates the mirror part about the second axis. A resonance frequency Ain a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator are rotated about the first axis in opposite phases to each other, a resonance frequency B in a lowest-order resonance mode as a resonance mode in which the mirror part and the first actuator oscillate in opposite phases in a direction orthogonal to both of the first axis and the second axis, a frequency difference F=A−B, a resonance frequency C less than F and closest to the F, and a resonance frequency D greater than F and closest to F satisfy F−C≥20 Hz and F−D≤−150 Hz.


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