The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Jan. 05, 2023
Applicant:

Murata Manufacturing Co., Ltd., Nagaokakyo, JP;

Inventors:

Kaoru Kishigui, Nagaokakyo, JP;

Koichi Yoshida, Nagaokakyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 9/00 (2006.01); B81B 7/00 (2006.01); B81C 1/00 (2006.01); G01L 9/00 (2006.01); G01L 19/06 (2006.01);
U.S. Cl.
CPC ...
G01L 9/0072 (2013.01); B81B 7/0048 (2013.01); B81B 7/0058 (2013.01); B81B 7/0064 (2013.01); B81C 1/00333 (2013.01); G01L 19/069 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/04 (2013.01); B81C 2203/0118 (2013.01);
Abstract

A pressure sensor structure includes a sensor body including a diaphragm plate that functions as a sense electrode, a base electrode that faces the diaphragm plate, and a sidewall layer maintaining a gap between the diaphragm plate and the base electrode, and a conductive guard substrate to support the sensor body. The sidewall layer includes a guard electrode layer and upper and lower electrically insulating layers to electrically insulate the guard electrode layer. An electrically insulating layer is between the guard substrate and the sensor body to electrically insulate the guard substrate. The guard substrate is electrically connected to the guard electrode layer to function as a guard electrode together with the guard electrode layer.


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