The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Apr. 13, 2020
Nikon Corporation, Tokyo, JP;
Michio Ohashi, Tokyo, JP;
Satoshi Takahashi, Kumagaya, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A measuring device includes an illumination system configured to radiate light to a measuring target object located on an object plane, an image formation system configured to form a conjugate plane optically conjugated with the object plane, a diffracted light restricting part configured to restrict at least some of a plurality of rays of diffracted light from the measuring target object and to pass a first diffracted light and a second diffracted light different from the first diffracted light among the plurality of rays of diffracted light, and an imaging part disposed on the conjugate plane and configured to image a periodic light and dark pattern formed by the first diffracted light and the second diffracted light.