The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Mar. 23, 2022
Applicant:
Nitto Denko Corporation, Ibaraki, JP;
Inventors:
Assignee:
NITTO DENKO CORPORATION, Ibaraki, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 27/30 (2006.01); C23C 14/02 (2006.01); C23C 14/06 (2006.01); C23C 14/35 (2006.01); H01J 37/32 (2006.01);
U.S. Cl.
CPC ...
C23C 14/0605 (2013.01); C23C 14/024 (2013.01); C23C 14/35 (2013.01); G01N 27/308 (2013.01); H01J 37/3277 (2013.01);
Abstract
An electrode includes a substrate film, a metal underlying layer, and a conductive carbon layer. A ratio (O/C) of oxygen to carbon at a place 4.5 nm away from a one-side surface of the conductive carbon layer toward the other side in the thickness direction is less than 0.01 where the ratio (O/C) of oxygen to carbon is measured using X-ray photoelectron spectroscopy.