The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Apr. 01, 2022
Samsung Electronics Co., Ltd., Suwon-si, KR;
Youn Gon Oh, Hwaseong-si, KR;
Sae Yun Ko, Hwaseong-si, KR;
Gil Ho Gu, Hwaseong-si, KR;
Dong Su Kim, Incheon, KR;
Ji Hun Kim, Uiwang-si, KR;
Sang Hyuk Park, Yongin-si, KR;
Eun Hee Lee, Hwaseong-si, KR;
Ho Chan Lee, Seoul, KR;
Seong Sil Jeong, Incheon, KR;
Seong Pyo Hong, Hwaseong-si, KR;
SAMSUNG ELECTRONICS CO., LTD., Suwon-si, KR;
Abstract
Provided is an equipment front end module (EFEM) including a base configured to communicate with a processor, a tray port on the base, the tray port being configured to load a tray including a stub and a grid holder, a working robot configured to move in a direction on the base, and grasp and convey the stub in the tray and the grid holder in the tray, and a shuttle port on the base, the shuttle port including a first groove configured to fix the stub, and a second groove configured to fix the grid holder, wherein the working robot is further configured to convey the stub to the first groove and convey the grid holder to the second groove.