Transistor structure including oxide semiconductor pattern surrounding bottom and sidewall of gate and semiconductor device using the same

Abstract

A transistor structure including an active pattern defined by a first isolation pattern on a substrate, a second isolation pattern at an upper portion of the active pattern, a gate structure extending through the active pattern and the first isolation pattern, at least a lower portion of the gate structure extending through the second isolation pattern, a first oxide semiconductor pattern on a lower surface and a sidewall of the gate structure, the first oxide semiconductor pattern including In-rich IGZO and at least partially contacting the first and second isolation patterns, and source/drain regions at upper portions of the active pattern adjacent to the gate structure may be provided.