The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
May. 10, 2024
Applicant:
Tignis, Inc., Seattle, WA (US);
Inventor:
Ryan Stoddard, Shoreline, WA (US);
Assignee:
Delta Design, Inc., Poway, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/18 (2006.01);
U.S. Cl.
CPC ...
G05B 19/188 (2013.01); G05B 2219/45031 (2013.01);
Abstract
In some embodiments, a computer-implemented method of controlling a semiconductor manufacturing process is provided. A computing system generates predicted metrology values for a current run and a next run by providing metrology forecast inputs to a metrology forecast model. The computing system generates an updated recipe for executing at least one semiconductor manufacturing process step using the predicted metrology values for the current run and the next run.