The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Dec. 20, 2021
Applicants:
Denso Corporation, Kariya, JP;
Toyota Jidosha Kabushiki Kaisha, Toyota, JP;
Mirise Technologies Corporation, Nisshin, JP;
Inventors:
Akihiko Teshigahara, Nisshin, JP;
Tetsuya Enomoto, Nisshin, JP;
Assignees:
DENSO CORPORATION, Kariya, JP;
TOYOTA JIDOSHA KABUSHIKI KAISHA, Toyota, JP;
MIRISE Technologies Corporation, Nisshin, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10N 30/853 (2023.01); H10N 30/093 (2023.01);
U.S. Cl.
CPC ...
H10N 30/853 (2023.02); H10N 30/093 (2023.02);
Abstract
A piezoelectric film layered structure includes a base, and a ScAlN film formed on the base. The ScAlN film has an unpaired electron density within a range between 1.7×10electrons/cm, inclusive, and 1.1×10electrons/cm, inclusive.