The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Sep. 19, 2022
Applicant:
Skyworks Solutions, Inc., Irvine, CA (US);
Inventors:
Assignee:
Skyworks Solutions, Inc., Irvine, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 17/02 (2006.01); H04R 17/00 (2006.01); H04R 19/04 (2006.01); H04R 31/00 (2006.01); H10N 30/06 (2023.01); H10N 30/076 (2023.01); H10N 30/082 (2023.01);
U.S. Cl.
CPC ...
H04R 17/02 (2013.01); H04R 17/005 (2013.01); H04R 19/04 (2013.01); H04R 31/00 (2013.01); H10N 30/06 (2023.02); H10N 30/076 (2023.02); H10N 30/082 (2023.02); H04R 2201/003 (2013.01);
Abstract
A method for making a piezoelectric microelectromechanical systems (MEMS) microphone is provided, comprising depositing a piezoelectric film layer onto a substrate; selectively etching the piezoelectric film layer to define lines; removing the substrate to define a cavity; and breaking the piezoelectric film layer along the lines, such that the microphone has at least two cantilevered beams. The piezoelectric microelectromechanical systems (MEMS) microphone is also provided.