The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Feb. 21, 2019
Nikon Corporation, Tokyo, JP;
Satoshi Takahashi, Kumagaya-shi, JP;
Michio Ohashi, Tokyo, JP;
NIKON CORPORATION, Tokyo, JP;
Abstract
A surface position detection device that information of a detected surface along an axis that intersects the detected surface includes: a light transmission unit having a modulated intensity in the detected surface in a first direction within the detected surface are radiated and superimposed onto the detected surface obliquely from a direction having a direction component in the first direction and forms an irradiation region on the detected surface; a light reception unit arranged with respect to the detected surface, receives at a different position of each light reception surface, the plurality of detection lights reflected by a detection region of which a width in the first direction is a predetermined value in the irradiation region, and outputs photoelectric conversion signal of the plurality of detection lights; and calculates the detected surface based on the photoelectric conversion signal of the plurality of detection lights output from the light reception unit.