The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2025

Filed:

Feb. 17, 2020
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventor:

Atsushi Era, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); C30B 25/18 (2006.01); C30B 29/40 (2006.01); H10D 30/47 (2025.01); H10D 62/85 (2025.01);
U.S. Cl.
CPC ...
H01L 21/02458 (2013.01); C30B 25/183 (2013.01); C30B 29/403 (2013.01); C30B 29/406 (2013.01); H01L 21/02505 (2013.01); H01L 21/0254 (2013.01); H01L 21/02576 (2013.01); H01L 21/02579 (2013.01); H01L 21/0262 (2013.01); H10D 30/475 (2025.01); H10D 62/8503 (2025.01);
Abstract

An epitaxial wafer according to the present disclosure includes: a substrate; a buffer layer formed of a crystal having the composition formula represented by AlGaInN (x+y+z=1, y>0) on the substrate; a back-barrier layer formed of a crystal having the composition formula represented by AlGaInN (x+y+z=1, y>0, z>0) on the buffer layer; a channel layer formed of a crystal having the composition formula represented by AlGaInN (x+y+z=1, y>0) on the back-barrier layer; and an electron-supply layer formed of a crystal having the composition formula represented by AlGaInN (x+y+z=1, x>0) on the channel layer. The channel layer is constituted with an upper channel layer underneath the electron-supply layer and a lower channel layer on the back-barrier layer, and the lower channel layer has a C concentration higher than the upper channel layer and contains Si.


Find Patent Forward Citations

Loading…