The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Apr. 30, 2020
Applied Materials, Inc., Santa Clara, CA (US);
Vijay D. Parkhe, San Jose, CA (US);
Andreas Schmid, Meyriez, CH;
Andrew Antoine Noujaim, Morgan Hill, CA (US);
Stephen Donald Prouty, San Jose, CA (US);
Alvaro Garcia De Gorordo, San Francisco, CA (US);
Martin Perez-Guzman, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A substrate support assembly is described herein that includes a facility plate, a ground plate coupled to the facility plate, a fluid conduit disposed within the substrate support assembly disposed through the facility plate and the ground plate, and a connector coupled to the ground plate that houses a portion of the fluid conduit. The connector includes a biasing assembly and a fastener disposed in a pocket formed in the ground plate.