The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Apr. 25, 2023
Applicants:
Melexis Technologies NV, Tessenderlo, BE;
X-fab Global Services Gmbh, Erfurt, DE;
Inventors:
Assignees:
Melexis Technologies NV, Tessenderlo, BE;
X-FAB Global Services GmbH, Erfurt, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01G 4/33 (2006.01); H01G 4/01 (2006.01); H01G 4/012 (2006.01); H01G 4/38 (2006.01); H10D 1/00 (2025.01); H10D 1/68 (2025.01);
U.S. Cl.
CPC ...
H01G 4/33 (2013.01); H01G 4/01 (2013.01); H01G 4/012 (2013.01); H01G 4/385 (2013.01); H10D 1/043 (2025.01); H10D 1/716 (2025.01);
Abstract
A unit trench capacitor in a substrate includes one or more trenches in the substrate, a dielectric layer, a first electrode and a second electrode. Walls of the one or more trenches are covered by the dielectric layer which separates the first electrode from the second electrode. Each trench follows a closed curve. The closed curve of each trench has one or more elongated parts in directions in which the substrate has a maximum elastic modulus, or the closed curve of each trench has a circular shape if the substrate has an isotropic elastic modulus.