The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Jan. 14, 2022
Applicant:
Lumentum Operations Llc, San Jose, CA (US);
Inventors:
Benjamin Kesler, Sunnyvale, CA (US);
Ajit Vijay Barve, San Jose, CA (US);
Guowei Zhao, Milpitas, CA (US);
Assignee:
Lumentum Operations LLC, San Jose, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 1/00 (2012.01); G03F 1/50 (2012.01);
U.S. Cl.
CPC ...
G03F 1/50 (2013.01); G03F 1/00 (2013.01);
Abstract
A wafer may comprise a substrate layer and a plurality of vertical cavity surface emitting lasers (VCSELs) formed on or within the substrate layer. A respective trench-to-trench distance associated with the plurality of VCSELs may vary across the wafer based on a predicted variation of an oxidation rate of an oxidation layer across the wafer.