The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 17, 2025

Filed:

Jun. 24, 2022
Applicant:

Tokyo Electron U.s. Holdings, Inc., Austin, TX (US);

Inventors:

Richard Wunderlich, Austin, TX (US);

Joseph S. Spector, Austin, TX (US);

Brian Degnan, Enfield, NH (US);

Patrick G. Drennan, Gilbert, AZ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 1/12 (2006.01); G01R 31/317 (2006.01); G01R 31/3185 (2006.01);
U.S. Cl.
CPC ...
G01R 31/31726 (2013.01); G01R 31/318516 (2013.01); G01R 31/318527 (2013.01); G06F 1/12 (2013.01);
Abstract

An apparatus has a collection of ring oscillators. An instruction register block is configured to sequentially address and activate each ring oscillator in the collection of ring oscillators. A multiplexer with input lines is connected to each ring oscillator in the collection of ring oscillators and an output line. A pulse counter is connected to the output line of the multiplexer to count the number of oscillations of a selected ring oscillator within a selected time period to form a multiple bit frequency count output signal. A data shift register receives the multiple bit frequency count output signal and produces a serial frequency count output signal.


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